Electron Microscopy
The Electron Microscopy Laboratory at ARC provides high-resolution imaging and analytical capabilities for researchers in the physical sciences, engineering, agriculture, manufacturing, and more. Open to university, state, and external users, the lab houses scanning electron microscopes (SEM) and a transmission electron microscope (TEM) to support detailed surface, thin-film, and nanostructure characterization.
Services:
- High-Resolution Imaging – Atomic-resolution imaging of thin films and nanoparticles using TEM.
- Crystallographic Analysis – Structural characterization through electron diffraction in TEM and electron backscatter diffraction (EBSD) for bulk crystalline samples in SEM.
- Elemental Analysis – Spatially resolved energy dispersive X-ray spectroscopy (EDS) for precise elemental mapping in SEM and in scanning transmission mode (STEM) in TEM.
- Cathodoluminescence (CL) Imaging – Optical characterization of materials providing insights into electronic structure, defects, and composition in semiconductors, minerals, and other luminescent materials.
- E-Beam Lithography – Nanopatterning capabilities using SEM for advanced fabrication applications.
- Sample Preparation – Coating services (gold, chromium, carbon) and mechanical polishing tools for optimal sample preparation.
- Air-free Sample Handling – Direct transfer of SEM sample from glovebox to SEM exchange chamber.
Users can be trained to operate the instruments independently or request assistance from expert staff. Training requirements vary by instrument, with SEM training taking a few hours and TEM training available through structured courses.
Instruments:
- JEOL JSM-IT800(HL) Field Emission SEM
- Detectors: Secondary electron (SED), Upper in-lens (UED), Retractable backscatter (VBED), STEM
- Analytical Tools: EDS (Oxford Ultim Max 170 mm²), EBSD (Oxford C-Nano+), CL (Deben Centaurus)
- Special Features: Gentle beam mode, low vacuum for insulating samples, e-beam lithography (NPGS)
- Sample Capacity: Up to 4-inch diameter, ~30 mm height, air-free sample transfer
- JEOL JSM-6500 Field Emission SEM
- Detectors: Secondary electron detector, retractable backscatter electron detector.
- Analytical Tools: EDS (Oxford Aztec), EBSD (EDAX)
- Special Features: Motorized stage, STEM holder for TEM grids
- JEOL JEM-2100F Transmission Electron Microscope (80-200 kV)
- Resolution: 0.195 nm TEM, 0.135 nm STEM
- Detectors: TEM (Gatan Ultrascan CCD), STEM (BF, ADF)
- Specimen Holders: Single-tilt, double-tilt, high-tilt (for tomography/microED), low-background EDS
- Analytical Tools: EDS (Oxford SSD, Aztec software)
- EM Sample Preparation Tools:
- Quorum Q150T ES Plus Coater – Metal sputtering and carbon evaporation for conductive coatings, with high vacuum capability and film thickness control.
- Pace Technologies PICO 155P Precision Cutter – High-accuracy wafering saw for sectioning metals, ceramics, and electronics (≤0.5 cm thick).
- Pace Technologies NANO 2000T Grinder-Polisher – Dual-wheel system for grinding and polishing various materials.
- Pace Technologies Giga-0900 Vibratory Polisher – Adjustable frequency polisher for simultaneous preparation of multiple samples.
- Plasma Cleaner – Removes hydrocarbons and modifies TEM substrates using oxygen or argon plasma.
Contact SEM: Rebecca Miller
Contact TEM: Roy Geiss
